http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20170056709-A

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publicationDate 2017-05-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20170056709-A
titleOfInvention Method for manufacturing semiconductor device
abstract An object of the present invention is to drive a semiconductor device at high speed and improve the reliability of the semiconductor device. In a method for manufacturing a semiconductor device, a gate electrode is formed on a substrate having an insulating property, a gate insulating film is formed on the gate electrode, an oxide semiconductor film is formed on the gate insulating film, and the gate insulating film is formed by a film forming process . Therefore, the number of unbound bonds in the gate insulating film is reduced, and the quality of the interface between the gate insulating film and the oxide semiconductor is improved.
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