| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_646018b7183a929bbb6e26dcdb62a8da |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B5-03
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B2562-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L19-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L1-2231
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B5-021
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B2562-0247 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-84
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L19-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L9-125
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B5-0008
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L1-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L13-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L13-025
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L1-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L9-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L9-0055
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L27-007 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-84
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01L13-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01L9-04 |
| filingDate |
2015-10-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9dde58d448a3db65611c1ef3ca7064b7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4619f1801031da96264a0d9bb401d082
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a02a2681307f046df482a8d7aa5baf2e |
| publicationDate |
2017-05-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20170053678-A |
| titleOfInvention |
Pressure sensor, differential pressure sensor, and mass flow rate control device using same |
| abstract |
Even when the diaphragm is made of stainless steel, the diaphragm and the strain sensor are not peeled off from each other and are hardly influenced by the use environment temperature, and the sensitivity of the pressure sensor is not controlled only by the dynamic characteristics of the material constituting the diaphragm , Thereby increasing the degree of design freedom of the members constituting the pressure sensor. In order to solve the above problems, a pressure sensor according to the present invention includes: a diaphragm which is deformed by a pressure of a fluid; an elastic body which covers the entire surface of the diaphragm and which is joined to the diaphragm on one side, And a strain sensor which is provided so as to be joined to an end portion side away from a position corresponding to the center of the diaphragm and which detects deformation of the elastic body in association with deformation of the diaphragm as strain, And a material having a coefficient of linear expansion that is close to the coefficient of linear expansion of the material to be formed. |
| priorityDate |
2014-10-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |