| abstract |
The present invention relates to a soft abrasive material comprising a hard abrasive core having a particle diameter of 0.1 to 1 μm and a soft oxide cell having a thickness of 5 to 100 nm and the oxide crystal grain size of the soft oxide cell is 5 to 20 nm, Discloses a hard core soft cell composite abrasive prepared by dispersing an aqueous solution of a precursor and a hard abrasive as raw materials, dispersing, hydrolyzing and hydrolyzing at room temperature, solid-liquid separation, washing and drying. The hard core soft cell structure of the present invention can improve processing efficiency and surface mass in the ultra-precision processing of a sapphire substrate. |