http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20170050706-A

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filingDate 2015-10-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4e1c6e3eb721611f6e5288b3e9af7804
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publicationDate 2017-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20170050706-A
titleOfInvention Photo-sensitive Composition, Cured Film Prepared Therefrom, and Device Incoporating the Cured Film
abstract (A) a siloxane compound represented by the following formula (1); (B) a quinone diazide compound, and (C) a solvent, wherein the weight average molecular weight of the siloxane compound represented by the formula (1) as measured by gel permeation chromatography (GPC: Gel Permeation Chromatography) in terms of polystyrene standards is 3,000 g / mole to 5,000 g / mole or less and the dissolution rate of the pre-baked film in the 2.38 wt% TMAH aqueous solution is 200 Å / sec or more and 2,000 Å / sec or less, or the polystyrene Wherein the weight average molecular weight in terms of a standard sample is 3,000 g / mole or more and the dissolution rate of the prebaked film in 5.0 wt% TMAH aqueous solution is more than 200 ANGSTROM / second and 5,000 ANGSTROM / second or less. [Chemical Formula 1] (R 1 R 2 R 3 SiO 1/2) M (R 4 R 5 SiO 2/2) D (R 6 SiO 3/2) T1 (O 3/2 Si-Y-SiO 3/2) T2 (SiO 4/2 ) Q In Formula 1, The definitions of R 1 to R 6 , Y, M, D, T 1, T 2, and Q are as described in the description of the invention.
priorityDate 2015-10-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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