http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20170050706-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_154f5a8a983d88f296117dcc92946ab4 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-022 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0048 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-022 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
filingDate | 2015-10-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4e1c6e3eb721611f6e5288b3e9af7804 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8519677af61d9807f73114a090d426ef http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_820bf3ea8c6714d16de8b349bb619934 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_406b8e40ea2b5f46c55c4d18632ed9fa http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_85ad4b0f273ad1bb100a6875c73de218 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6b1745a386da99ea42f97943535a55c4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b60b00964e6d5e8f6ecebabe0c1f78f7 |
publicationDate | 2017-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | KR-20170050706-A |
titleOfInvention | Photo-sensitive Composition, Cured Film Prepared Therefrom, and Device Incoporating the Cured Film |
abstract | (A) a siloxane compound represented by the following formula (1); (B) a quinone diazide compound, and (C) a solvent, wherein the weight average molecular weight of the siloxane compound represented by the formula (1) as measured by gel permeation chromatography (GPC: Gel Permeation Chromatography) in terms of polystyrene standards is 3,000 g / mole to 5,000 g / mole or less and the dissolution rate of the pre-baked film in the 2.38 wt% TMAH aqueous solution is 200 Å / sec or more and 2,000 Å / sec or less, or the polystyrene Wherein the weight average molecular weight in terms of a standard sample is 3,000 g / mole or more and the dissolution rate of the prebaked film in 5.0 wt% TMAH aqueous solution is more than 200 ANGSTROM / second and 5,000 ANGSTROM / second or less. [Chemical Formula 1] (R 1 R 2 R 3 SiO 1/2) M (R 4 R 5 SiO 2/2) D (R 6 SiO 3/2) T1 (O 3/2 Si-Y-SiO 3/2) T2 (SiO 4/2 ) Q In Formula 1, The definitions of R 1 to R 6 , Y, M, D, T 1, T 2, and Q are as described in the description of the invention. |
priorityDate | 2015-10-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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