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publicationDate 2017-04-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20170040452-A
titleOfInvention Cmp slurry composition for organic film and polishing method using the same
abstract The present invention relates to ceria; And an organic film CMP slurry composition containing cerium nitrate and having a selection ratio of 100 or more according to the following formula 1, and a polishing method using the organic film CMP slurry composition: [Formula 1] (? / Min), and? Is the polishing amount (? / Min) for the inorganic film.
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