http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20170032397-A

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d3082cd39bb800686b9abbb8aa05c80b
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-0084
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-265
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-268
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-3209
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-267
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-7684
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0047
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-3272
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02074
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02052
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-0073
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-264
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-3245
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-3218
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-10
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D11-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-32
filingDate 2015-07-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6b1ac57d266ad3c8fea02d26b26777a7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ad2e8f49cc1e4eb57e3db5eecee94ee4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1aba77462a385873e930320ab1381ffb
publicationDate 2017-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20170032397-A
titleOfInvention Cleaning composition following cmp and methods related thereto
abstract The present invention provides a composition for cleaning contaminants from semiconductor wafers after chemical-mechanical polishing. The cleaning composition contains a giant protecting ligand, an organic amine, an organic inhibitor, and water. The present invention also provides a method of using the cleaning composition.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019156407-A1
priorityDate 2014-07-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010174074-A
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID135404161
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419545531
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9086
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9812747
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419507743
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID370
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16698
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7902
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8471
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID289
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID962
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419596115
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6363
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11723
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8113
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7852
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419517913
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5862
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451557839
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6509
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453615033
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14923
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453284053
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2723671
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419490133
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5324276
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559029
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419541999
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID723
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559256
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419523138
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419552883
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419488277
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422954171
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458397482
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID19463
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419553602
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID73948
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419553636
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID700
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8007
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419483691
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419526710
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419554224
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449671999
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6049
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419518301
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559356
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419523148
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID961
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419515814
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8021
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3469
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID25041
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16134267
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419547110
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12219
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419520471
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450664886
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7912
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6329
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID42963
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID68166
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7622
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415725299
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419474383
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9015
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453646236
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419519629
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419474477
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21865427
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID977
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419594084
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8068
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453327643
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419523291
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512635
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID674
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID60966
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450242332
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559564
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559487
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419484514
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419538597
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419564891
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410916410
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559568
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID785
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451859813
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID54670067
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID223
http://rdf.ncbi.nlm.nih.gov/pubchem/anatomy/ANATOMYID434418
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21643693
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7618
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410515802
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419557696
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID118525
http://rdf.ncbi.nlm.nih.gov/pubchem/taxonomy/TAXID434418
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID27099
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419513221
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6341
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419485715
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3053
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID18786255
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419558575

Total number of triples: 144.