| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9305fc720f87097494d965f1b1310e24 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02266
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-562
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3471
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-203
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-0635
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-06 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-203
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-56 |
| filingDate |
2015-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_59187985ec13b7fcd3dca69c5f41b57b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b9ef7ab0dfdbf3b092ecc475a7ebd113
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_63e21bee593e95fe67ef0fa30d764b7b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_41cadc9f1b3e0b08580fba7df9eecc5d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_18ab64bc58db45a9ff7d78d2ef58a071
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_10b40f66acc6b7a7cc05ef9ce7b885e6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_50985305a712607fc651f9395faa04dd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dacf78051a28af7b86966795000ad9fd |
| publicationDate |
2017-03-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20170026985-A |
| titleOfInvention |
Method for manufacturing fluorocarbon thin film and fabrication equipment therof |
| abstract |
The present invention relates to a method for producing a fluorocarbon thin film capable of sputtering at a lower energy by forming a plasma stably even in a DC and MF power supply system widely used in industry by imparting conductivity to a super water repellent and highly insulating fluoropolymer. To a continuous roll-to-roll type sputter deposition system for manufacturing. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111593320-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200077234-A |
| priorityDate |
2015-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |