http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20170021974-A

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publicationDate 2017-03-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20170021974-A
titleOfInvention Semiconductor ultraviolet light emitting device
abstract A first AlN layer having a plurality of nano rods arranged on the substrate, a second AlN layer disposed on the first AlN layer such that voids exist between the plurality of nano rods, A first conductive type nitride layer disposed on the second AlN layer and having a first conductive type AlGaN layer; a second conductive type nitride layer disposed on the first conductive type nitride layer, the first conductive type nitride layer having Al x In y Ga 1 -xy N And a second conductivity type nitride layer disposed on the active layer and having a second conductivity type AlGaN layer, wherein the active layer has a quantum well (0? X + y? 1, 0? Y <0.15) (D) of the plurality of nano rods satisfies 3.5? N (?) D /?? 5.0 when the refractive index of the light having the specific wavelength? And a semiconductor ultraviolet light emitting element.
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