| abstract |
Embodiments of the present disclosure generally relate to comprehensive, extensible substrate inspection systems. Inspection systems can be fabricated using methods such as thickness, resistivity, saw marks, geometry, stains, chips, microcracks, crystal fraction, Includes a plurality of metrology units adapted to inspect, detect, or measure one or more characteristics of a substrate, including photoluminescence. The inspection systems can be utilized to identify defects on the substrates and estimate the solar cell efficiency of the solar cells produced as a substrate before processing the substrate with the solar cells. The substrates may be transferred through a testing system between the measuring units on a track or conveyor, and then sorted based on inspection data. |