abstract |
This laser system is a laser system having a first laser device for outputting a first pulse laser light, a second laser device for outputting a second pulse laser light, a timing detector, and a control section, Wherein the control unit is configured to detect a first passing timing at which the first pulse laser beam passes through the first position and a second passing timing at which the second pulse laser beam passes through the second position, And controls the first trigger timing for the first laser device to output the first pulse laser light and the second trigger timing for the second laser device to output the second pulse laser light based on the second pass timing . |