http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20170017383-A

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filingDate 2015-08-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7d291fa1073faf1f038eda4b6aa68656
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publicationDate 2017-02-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20170017383-A
titleOfInvention Integrated circuit device having through-silicon via structure
abstract The integrated circuit device includes a first substrate, a first structure including a first interlayer insulating film structure formed on a front surface of the first substrate and including a plurality of first conductive pad layers spaced at different levels, A second structure including a second interlayer insulating film structure formed on a front surface of the second substrate facing the front surface of the first substrate and bonded to the first interlayer insulating film structure; And a TSV structure penetrating the structure and contacting at least two first conductive pad layers located at different levels among the plurality of first conductive pad layers.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190078034-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20210000576-U
priorityDate 2015-08-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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