| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d3163957db744d0171ae3ff8ab14f0d5 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-2366
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-23
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B21-0032 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-23
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-09 |
| filingDate |
2015-07-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_61d800d0836fc75e3635dc97e2abc631
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a9dce7ae6dc5f679b3cdc456d441e468
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_479c34d3f25ea593e9d516dc4d61bbd5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8fdaf36d713fbdc890fe69a74ff8342f |
| publicationDate |
2017-02-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20170011731-A |
| titleOfInvention |
Tunable UV LASER GENERATOR FOR ULTRA HIGH RESOLUTION MICROSCOPE LIGHT SOURCE AND GENERATING METHOD THEREOF |
| abstract |
The present invention relates to a laser oscillator having a short wavelength of 200 nm or less and variable wavelength, a high output and a stable optical output characteristic, and a method of oscillating the laser oscillator to realize an ultra high resolution of several hundred nanometers in an industrial microscope The UV laser oscillator of the present invention includes an L-type vacuum chamber 100 including a pumping light input unit 110, a light output unit 120, a gas inlet 130 and a gas outlet 140, A second lens 220 inserted into the optical output unit 120 and a filter 300 installed at a rear end of the second lens 210 and a source And a driving unit 500 including a holder 400 and a motor 510 and a driving shaft 520. |
| priorityDate |
2015-07-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |