| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_781c429e4e20536916ff74dcbe1b5417 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2855
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76873 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C22C9-01
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3414
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C22C9-05
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C22C1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C22F1-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3429 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C22C9-05
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C22C9-01
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C22F1-08 |
| filingDate |
2014-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ffa3d93f6e26985136aaa112ad52a472
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ddf6cdca6af80b4d2ad0a4483fb852d0 |
| publicationDate |
2017-01-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20170005146-A |
| titleOfInvention |
Copper alloy sputtering target |
| abstract |
A copper alloy sputtering target comprising 1.0 to 5.0 at% of Mn, 0.1 to 4.0 at% of Al, and the balance of Cu and inevitable impurities, wherein a deviation of the composition within the sputtering target surface is within 20% Wherein the copper alloy sputtering target is a copper alloy sputtering target. The present invention relates to a copper alloy sputtering target which can form a stable and uniform seed layer without any aggregation during copper electroplating, and which is excellent in sputtering film formation property, and a semiconductor device wiring formed using a copper target And the like. |
| priorityDate |
2013-03-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |