Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ed62b7551998e54b35784cdbbb2778d5 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2021-60187 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0262 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02532 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0245 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02488 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45542 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45546 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67207 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02274 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0228 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45557 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-60 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67 |
filingDate |
2016-06-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3cd060bc4a3d9ce9aba67e94c46a132b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3c87a654bcbfbbbfc4ac5b550953e79e |
publicationDate |
2016-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
KR-20160145502-A |
titleOfInvention |
Method of manufacturing semiconductor device, substrate processing apparatus, and program |
abstract |
Thereby improving the film quality of the film formed on the substrate. Supplying a first raw material containing a predetermined element and a ligand containing at least one of carbon and nitrogen to a substrate in order to form a first raw material adsorption layer on the substrate; Forming a seed layer containing a predetermined element on the substrate by alternately performing a predetermined number of times of removing the ligand from the adsorption layer of the first raw material by supplying a ligand desorption material to the substrate; And a step of supplying a second raw material containing no ligand including a predetermined element to form a film containing the predetermined element on the seed layer. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20210050445-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101908120-B1 |
priorityDate |
2015-06-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |