| abstract |
The present invention includes at least one repeating unit (A) having the following structure (1), at least one repeating unit (B) having the structure (2), and at least one repeating unit (C) having the structure A cross-linkable polymer; ≪ / RTI > and a solvent, Wherein D is a direct atomic bond or C (R 1 ) (R 2 ) methylene moiety wherein R 1 and R 2 are independently H, C 1 -C 8 alkyl, C 3 -C 24 cycloalkyl or C 6 -C 24 aryl; Ar i , Ar ii , Ar iii and Ar iv are independently phenylene or naphthalene moieties, R 3 and R 4 are independently hydrogen or C 1 -C 8 alkyl; R 5 and R 6 are independently hydrogen or C 1 -C 8 alkyl. The present invention also relates to a method of forming an image using a novel antireflective coating composition. |