abstract |
And a lid formed to surround the functional area so as to form a space between the functional area and the lid part, wherein the lid part includes: And the lid portion includes a sheet (S) having a thickness of at most 100 탆, and a tensile elastic modulus (Es) at 175 캜 of the sheet (S) is 10 GPa or more. The tensile modulus (Es) of the sheet (S) at 175 캜 is preferably 20 GPa or more. |