http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20160140319-A

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filingDate 2015-11-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2016-12-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20160140319-A
titleOfInvention Semiconductor structure and manufacturing process thereof
abstract A method of manufacturing a semiconductor structure is provided. The process begins with the formation of a work-function metal layer on the substrate, and a hard mask is coated over the work-function metal layer. A trench is formed to penetrate the hard mask and the work function metal layer, and the isolation structure is filled in the trench.
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priorityDate 2015-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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