http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20160133915-A

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filingDate 2015-05-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e3f01f60b9169ce87d960305468c5795
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publicationDate 2016-11-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20160133915-A
titleOfInvention Lighting Apparatus for Vision Inspection
abstract The present invention relates to a substrate lighting inspection unit for irradiating an illumination light to a substrate and obtaining a surface inspection image of the substrate to check whether or not the surface of the inspection object adheres to the surface of the substrate and includes a parallel illumination unit arranged at least at one end parallel to the traveling direction of the substrate An illumination unit, and an image sensing unit spaced apart from the substrate and capable of capturing an image of the surface of the substrate.
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type http://data.epo.org/linked-data/def/patent/Publication

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