| abstract |
[PROBLEMS] To provide a coating liquid applied to a resist pattern used in place of a conventional rinsing liquid. A coating liquid applied to a resist pattern comprising a polymer having a structural unit represented by the following formula (1) and a solvent containing water and / or an alcohol. (Wherein R 1 represents an organic group having 1 to 12 carbon atoms, and X represents an organic group represented by the following formula (2). (Wherein R 2 and R 3 each independently represent a linear or branched alkylene group having 1 to 3 carbon atoms, the R 2 is bonded to the oxygen atom in the formula (1), and R 4 is a carbon atom An alkoxy group of an embroidering number of 1 to 4, an allyloxy group or a hydroxy group, and p represents 0, 1 or 2) |