http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20160112827-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_dd7c27b9ec61781656e6f039702fd568 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N30-7206 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N30-72 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N30-72 |
| filingDate | 2015-03-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0d337d00f720253cba47a164a61f5edd http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f5c21026ceed27353d738c0f2517d351 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4f5df383fc2da959da00addeff184369 |
| publicationDate | 2016-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20160112827-A |
| titleOfInvention | Identification and quantitative analysis method of detergent deflux composition using mass spectrometry |
| abstract | The present invention relates to a method of identifying and quantifying a deflux detergent using a mass spectrometer, and more particularly, to a method of determining the composition of a deflux detergent used for removing a flux in a semiconductor process using a mass spectrometer, And a method for quantitatively analyzing the content. The present invention finds out the components and content of undifferentiated components and their contents by using gas or liquid chromatography-mass spectrometry, and not only is it possible to identify the cause of the difference in performance and efficiency depending on the type of diplex, Can be used for the study of diprophy production. |
| priorityDate | 2015-03-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 30.