| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c0444efde206a2f829562761e58b7e1e |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L33-0075
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L33-20 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0007
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-80
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0048
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-028
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2012 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-80
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-028
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 |
| filingDate |
2015-01-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_05b48ef40404d3f90ed05f54aa32c3a9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8f715a4df73a88720601cd3d556ccc35 |
| publicationDate |
2016-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20160111918-A |
| titleOfInvention |
Photocurable composition for nanoimprinting, and method for forming ultrafine pattern using the composition |
| abstract |
There is provided a photocurable composition for a nanoimprint capable of transferring a fine pattern of a mold with good precision while maintaining uniform film thickness without leaving a resin even after a uniform coating film is formed on a wafer and left for a predetermined time . (A), (B), (C) and (D), and the component (C) is contained in the total amount (100% by weight) of the photocurable composition. The photocurable composition for a nanoimprint of the present invention comprises By weight based on the total weight of the composition. Component (A): A cationic curing compound represented by the following formula (1) Component (B): Photo cationic polymerization initiator Component (C): a solvent having a hydroxyl group-containing boiling point of 100 占 폚 to 210 占 폚 (760 mmHg) Component (D): a solvent having no monomer and having a boiling point of 140 ° C to 210 ° C (760 mmHg) and a solubility parameter of 8.0 to 10.0 (cal / cm 3) 1/2 |
| priorityDate |
2014-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |