| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-7787 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05C9-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05C5-0225
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67017
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05C11-1013
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67051
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05C5-0204 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05C5-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05C9-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05C11-10 |
| filingDate |
2015-01-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dc948789cfc455f1760b958e0549c50d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ad3cd6a9161f1ac6317ad909f1863fe6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3732339978880a7718b6b44afdfcd376
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4f4bcec71ea3b02684416c7a66de8e8e |
| publicationDate |
2016-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20160111490-A |
| titleOfInvention |
Inline dispense capacitor |
| abstract |
A fluid dispensing apparatus is disclosed. The system includes an inline or linear bladder device configured to expand to collect the fluid input and to deflate to facilitate fluid delivery and dispensing. During the dispense-off period, the process fluid may collect in the blister after the process fluid has been pushed through the microfilter (microfilter). A given filtration rate may be less than the dispensing rate and thus the system here provides a generally linear configuration that reduces the chance for defect creation while compensating for filter lag which often involves fluid filtration for micro fabrication . |
| priorityDate |
2014-01-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |