http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20160110657-A

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G2261-3242
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G2261-3243
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G2261-3241
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G2261-322
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G12-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G12-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-094
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31144
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G16-0256
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G65-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G61-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0337
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G75-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02118
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F216-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0332
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G61-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11
filingDate 2015-03-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9711a30c5d169092e5087cb7597e1685
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0920aa17158f37f5d8a89bea19020fed
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2e4ca414bfc1fea24e2ca99aa5f04de9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d2119092a78a5e49ba6caf13d1b581f9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_61db37b398e25a93c6f9583452752cb4
publicationDate 2016-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20160110657-A
titleOfInvention Polymer for hard mask, hard mask composition including the polymer, and method for forming pattern of semiconductor device using the hard mask composition
abstract The present invention relates to a polymer for a hard mask, a composition for a hard mask comprising the same, and a method for forming a pattern of a semiconductor device using the hard mask composition, and is provided with a polymer for a hard mask comprising a compound represented by the following formula . [Chemical Formula 1] In Formula 1, A, Q, L, R1 to R3 and n are as defined in the specification.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20210113909-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20210026557-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11512162-B2
priorityDate 2015-03-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20140069163-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014208499-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20120038447-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014024836-A1
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2286
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID25644
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8679
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID568
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458392451
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425064323
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454482646
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID33665
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458394811
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420553363
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419538728
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3283
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID466102
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID122409
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415719525
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559526
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID424622899
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID93118
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419097000
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID162461
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420316113
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID413552043
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID81080
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450273274
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415863310
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8054
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449606177
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID413965523
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16387
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414862845
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID17756
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411499242
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16891
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421352388
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559261
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID18689
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419590040
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13254
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID158667426
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID174
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID149269
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3023
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420171292
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415793113
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419572921
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID93414
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID31244
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454285062
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID31423
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID76689
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419635416
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410536445
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419544893
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8766
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6319
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8764
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID123223
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11040
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453703788
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7979
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID807086
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID44241874
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID409258927
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID171378
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425106687
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415970946
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451862836
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID76991
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID977
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID18628414
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID521998
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID409982726
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416039242
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420238514
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3715291
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID931
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11251
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421316506
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414859134
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414885125
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419572908
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID69504
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID440113
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419582769
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID407133350
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419556970
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451594239
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426816871
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID76911
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID68283
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425199706
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID413850786
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415852174
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414880553
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID407611241
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415713226
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419569655
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415715942
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID409566743
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415792570
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5080429
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID402
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID91435
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID417430547
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12276020
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411932971
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID947
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID447849585
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6195
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16680
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID458262
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416085160
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID19042
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415822230
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID160095282
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410947890
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414855554
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID81313
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8146
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419484742
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID28803
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14581
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9942853
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID126
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2764110
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426414990
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415823500
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8418
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID222
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID517422
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415953217
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415858754
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID406903349
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID20375919
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID175
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID19065315
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419579030
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458397310
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID612177
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419523291
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID365393
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421260166
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410412555

Total number of triples: 186.