http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20160109235-A

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6f932d94618d9b875e401457b33e9761
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30604
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-06
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
filingDate 2015-03-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_662eca80e8da6148016632b551e3dc0d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c9ec46b170ace6d29ccb709ebee3db1c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dda5d9b4c7c1c7662ca08901d598183d
publicationDate 2016-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20160109235-A
titleOfInvention Etching solution composition for copper-based metal layer and etching method using the same
abstract (C) from 1 to 10% by weight of an inorganic acid, (d) from 0.5 to 3% by weight of a thiazole compound, based on the total weight of the composition, (G) 0.1 to 10% by weight of an organic acid or an organic acid salt, and (h) a residual amount of water. A metal film etchant composition and an etching method using the same.
priorityDate 2015-03-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20120111636-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20100090538-A
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454066690
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14009640
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID406954886
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID176
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID313
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419474387
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID412584819
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24247
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457555073
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415079102
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7991
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID440409
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12438
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450126867
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415810939
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451203358
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448616730
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453149268
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419698070
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23978
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID27099
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419474364
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID311
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID304271
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448670727
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411550722
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419474094
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419554224
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450502002
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23963
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID962
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419474451
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID107879
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419485112
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450408979
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10690
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453569306
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID612
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419474490
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID417109324
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID525
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID264
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419474445
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559477
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23665763
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID406903350
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559473
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448151759
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451268575
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449935498
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID447669256
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID412833275
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID944
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID757
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5235
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID18616
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID447315
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419527779
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5234
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6581
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID284
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID25517
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6049
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21220
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID971
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559356
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID522689
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415779297
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1004
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID447831437
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID407364031
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID418354341
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID867
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1118
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451908603
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419474255
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID62655
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419533227
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID85053
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID25516
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID62648
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID25423
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419405613
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID4873
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID752
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID407631466
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID105970
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1110
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14935
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419527900
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID408497310
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419579414
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419557048
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID20467
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452434431
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7322
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID338
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419490743
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425264416
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24412
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID219061
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512635
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419578517
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8897
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414206935
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23932
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559357
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12903336
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID407698410
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12748

Total number of triples: 134.