| abstract |
Embodiments of the present invention provide devices for atomic layer deposition (ALD) such as plasma enhanced ALD (PE-ALD). In one embodiment, a showerhead assembly is provided, the showerhead assembly including a showerhead plate having a top surface and a bottom surface, and a radius, the radius extending from a center of the showerhead plate to an outer edge, A first plurality of holes in fluid communication with the face and bottom surface and positioned within a first zone extending from a center of the showerhead plate to about 25% of a radius of the showerhead plate, each hole having a diameter And a second plurality of holes in fluid communication with the top and bottom surfaces and positioned within a second zone extending from about 25% of a radius of the showerhead plate to an outer edge of the showerhead plate, Lt; RTI ID = 0.0 > 0.1 ". ≪ / RTI > |