| abstract |
The invention relates to a metal component selected from at least one polyoxometallate, at least one heteropolyoxometallate, and mixtures thereof; And at least one organic component. The present invention also relates to nanorod arrays and methods of making nanorod materials and films. The present invention also relates to a novel composition for producing a metal oxide rich film and also relates to a process for imaging via via or trench filling, reverse via or trench filling and underlayer. Such materials are useful in a wide variety of manufacturing applications in numerous industries, including semiconductor devices, electro-optical devices and energy storage industries. |