| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ec83ea8e6721b1a5654b038fdb9b223f |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67051
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6708
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67017
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-683
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67028
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67248
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02343
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67109
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6715
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02307 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate |
2016-02-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5e4ad6ccff497e0948e8315bf7d97e62
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6689a4edb260bdf9686be431ea23c8a8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1b54866b2315e78c40b32f729c654af8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c4401990546ade389281c2b3d43438d9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5bb733bae6a26ff266fa2fa0d4331f89
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_479f76c346538fe9eb8fb6a65ab3b18f |
| publicationDate |
2016-08-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20160101878-A |
| titleOfInvention |
Substrate processing apparatus |
| abstract |
The supply flow path is branched into a plurality of upstream flow paths. The plurality of ejection openings are respectively arranged at a plurality of positions at different distances from the rotation axis. Hydrogen peroxide, which is one component of the chemical solution (SPM), is supplied to the upstream passage from the component liquid passage. The mixing ratio changing unit including the plurality of first flow rate adjusting valves and the plurality of second flow rate adjusting valves independently changes the mixing ratio of the sulfuric acid and the hydrogen peroxide solution contained in the chemical liquid discharged from the plurality of discharge ports to each of the upstream flow paths. |
| priorityDate |
2015-02-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |