| abstract |
The display device includes a first substrate, a plurality of micro electro-mechanical system (MEMS) light modulators formed of a structural material coupled to the first substrate; And a second substrate isolated from the first substrate. The plurality of spacers extend from the first substrate to maintain a minimum distance away from the plurality of optical modulators. The spacers include a first polymer layer having a surface in contact with the first substrate, a second polymer layer encapsulating the first polymer layer, and a layer of structural material encapsulating the second polymer layer. The spacers may be used as fluid barriers and are configured to surround more than all but one of the MEMS light modulators in the display device. |