http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20160100260-A

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filingDate 2016-02-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8a1a62fffe6926a274f503bda1f17ec4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9f48620c7898b568a6171a1f0801981c
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publicationDate 2016-08-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20160100260-A
titleOfInvention Bisaminoalkoxysilane compounds and methods for using same to deposit silicon-containing films
abstract Disclosed herein are bisaminoalkoxysilanes of formula (I), and methods of using the same: R 1 Si (NR 2 R 3 ) (NR 4 R 5 ) OR 6 I Wherein R 1 is selected from the group consisting of hydrogen, a C 1 to C 10 linear alkyl group, a C 3 to C 10 branched alkyl group, a C 3 to C 10 cyclic alkyl group, a C 3 to C 10 alkenyl group, a C 3 to C 10 alkynyl group, A C 4 to C 10 aromatic hydrocarbon group; R 2, R 3, R 4 , and R 5 are each independently hydrogen, C 4 to C 10 branched alkyl, C 3 to C 10 cyclic alkyl groups, C 3 to C 10 alkenyl groups, C 3 to C 10 alkynyl And a C 4 to C 10 aromatic hydrocarbon group; R 6 is a C 1 to C 10 linear alkyl group, a C 3 to C 10 branched alkyl group, a C 3 to C 10 cyclic alkyl group, a C 3 to C 10 alkenyl group, a C 2 to C 10 alkynyl group, and a C 4 to C 10 &lt; / RTI &gt; aromatic hydrocarbon group.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020111405-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11267828-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190058698-A
priorityDate 2015-02-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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