| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1584c21cf27f9e557aec39240422a393 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-786
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0274
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32134
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3213
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76813 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3213
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| filingDate |
2015-02-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_978c5696f2389601f80ce66ff436d1dd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_157df80a41cc0adb0b687e5cab7a1fff |
| publicationDate |
2016-08-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20160099918-A |
| titleOfInvention |
Method for etching a multi-layered metal film and etchant |
| abstract |
A multi-metal film etch process is disclosed wherein the multi-metal film etch process comprises a first layer of a material comprising at least one of copper (Cu) and a copper alloy, and at least one of titanium (Ti) and a titanium alloy A method for etching a multi-metal film including a second layer made of a material, the method comprising: forming a photoresist film having a predetermined pattern on the multi-metal film; Etching the multi-metal film using an etchant; And removing the photoresist film. In the step of etching the multi-metal film, the etchant includes 0.1 to 10.0 wt% of a phosphonic acid-based compound based on the total weight of the etchant. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11683975-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021343944-A1 |
| priorityDate |
2015-02-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |