| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6f932d94618d9b875e401457b33e9761 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-1333
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30604
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-26 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-08 |
| filingDate |
2015-02-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9ed1b7e3fecc5a3e823ad944defb1486
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9094351ab429c10ea501e9d7e0fae0cf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_452e8b0a7884c83ef87236947e5f6a6b |
| publicationDate |
2016-08-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20160095470-A |
| titleOfInvention |
Etching solution composition for molybdenum-based metal layer or indium oxide layer and method for etching molybdenum-based metal layer or metal oxide layer using the same |
| abstract |
The present invention relates to a molybdenum-based metal film or an indium oxide etchant composition and a method of manufacturing an array substrate for a liquid crystal display device using the same. More particularly, the present invention relates to a molybdenum-based metal film or an indium oxide film etching solution containing hydrogen peroxide, a fluorine compound, Film or an indium oxide etchant composition and a method of manufacturing an array substrate for a liquid crystal display using the same. |
| priorityDate |
2015-02-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |