| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5f7f120efe096284c7389702c969cf3d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_82cbc291d77c061ac9a216f86ec010a3 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G2261-3325
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G2261-122
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G2261-724
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G2261-77
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G2261-1426
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G2261-143
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G2261-92
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-05
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G2261-418 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K5-5425
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-293
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-3171
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02318
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L33-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66969
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L65-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02565
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02118
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02123
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7869
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F2-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F283-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G61-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L65-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F2-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F283-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786 |
| filingDate |
2014-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7b1b0be2d9e6b8ac8558ee36c81b9c36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f0b4a91a658a8b087e8878131da62f0c |
| publicationDate |
2016-08-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20160093610-A |
| titleOfInvention |
Semiconductor element manufacturing method |
| abstract |
1. A method for manufacturing a semiconductor device, comprising: a semiconductor layer forming step of forming a semiconductor layer containing an inorganic oxide semiconductor on a substrate; a passivation film forming step of forming a passivation film of an organic material so as to cover the semiconductor layer; A method of manufacturing a semiconductor device having a cooling step of cooling after firing, the method comprising the steps of: firing the firing step at the time of cooling in the cooling step to a temperature lower than the firing temperature at firing by 50 deg. Is controlled substantially within a range of 0.5 to 5 占 폚 / min. The present invention also provides a method of manufacturing a semiconductor device. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20220075660-A |
| priorityDate |
2013-11-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |