| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_424db9d56b06a23aed410fcf5df652f3 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B2307-206
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B2255-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B2457-14 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0277
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D183-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L83-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-3171
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0382
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B3-266
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B3-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0274 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-52 |
| filingDate |
2015-12-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_05f24d2638752f91da99fd428166da82
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0a6c7650c719ac8d174c25eca4982f8d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_36a022477ff7eb5d7149203b2aec646b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dfd817b3b4b7b6b42ab0ea6796adcec2 |
| publicationDate |
2016-07-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20160085695-A |
| titleOfInvention |
Silicone structure-bearing polymer compound, chemically amplified negative resist composition, photo-curable dry film and producing method thereof, patterning process, layered product, substrate, and semiconductor device |
| abstract |
[PROBLEMS] It is possible to solve the problem of peeling occurring on a metal wiring such as Cu or Al, on an electrode or a substrate, particularly on a substrate such as SiN, and to form a fine pattern without generating scum or footing on the pattern bottom, The present invention provides a polymeric compound containing a silicon skeleton which is commonly used as a base resin of a chemically amplified negative resist material that can be used. [Means for Solving the Problem] A silicone skeleton-containing polymer having a repeating unit represented by the following general formula (1). [Chemical Formula 1] |
| priorityDate |
2015-01-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |