http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20160084445-A

Outgoing Links

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assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_390ce1994f25efc27a636f44c0d3ec37
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classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-677
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67
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filingDate 2014-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c5921d1ee390d02201009990861ddf61
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cb815c70cff7fb01e1a5ccac6759a377
publicationDate 2016-07-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20160084445-A
titleOfInvention Dispensing apparatus having transport system and method for transporting a substrate within the dispensing apparatus
abstract A dispenser configured to dispense viscous material on a substrate includes a frame, a gantry system coupled to the frame, and a dispensing unit coupled to the gantry system. The gantry system is configured to move the dispensing unit in the x-axis, y-axis, and z-axis directions. The dispenser includes a substrate support assembly coupled to the frame and configured to support the substrate to dispense material on the substrate at a dispense position, and a transfer system configured to transfer the substrate to the dispense position and to remove the substrate from the dispense position. . The transfer system includes a first pusher assembly configured to move the substrate within the dispenser. A transfer system and a method for dispensing material on a substrate are further disclosed.
priorityDate 2013-11-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

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Total number of triples: 23.