http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20160082655-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_65e6cc42bb2719da1d60772d005416f5 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02263 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate | 2014-12-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b3c272e131830415c2449e65dee5696c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_250057cf9f67cfee437ec4d1d8d69272 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_50c665c07f598b30eb587b34d4865e07 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aed3d9b5c6b9dd6442bec58c855e46da |
| publicationDate | 2016-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20160082655-A |
| titleOfInvention | Silane gas supply |
| abstract | The present invention relates to a silane gas supply comprising: a first supply part which is connected to a trailer, to which silane gas is supplied, and which discharges the silane gas inside a pipe when the trailer is being replaced and connected; a second supply part receiving the silane gas of the trailer through the first supply part to supply the silane gas to a process device; and a burn box processing the silane gas discharged from the first supply part. The first supply part includes: a flow rate control vent controlling a flow rate of the silane gas discharged to the burn box to prevent excessive silane gas from being discharged to the burn box; and a purge vent line limitlessly discharging the residual silane gas and purge gas supplied by a purge gas control part to the burn box. The present invention provides effects of improving safety and reliability as the inflow rate of the silane gas to the burn box is limited when the silane gas is being discharged and the flow rate of the discharged purge is not limited during a purge in order to prevent explosion caused by excessive silane gas flowing into the burn box. |
| priorityDate | 2014-12-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 18.