| abstract |
The present invention includes the steps of preparing a solution containing a transition metal oxide precursor, a chelating agent and a polar organic solvent, maintaining the solution under agitation to form a sol, and using the sol in the form of a transition metal oxide To a thin film manufacturing method. The process is characterized in that the chelating agent is selected from di- or tri-aliphatic carboxylic acids, or salts or mixtures thereof, and the polar organic solvent has a boiling point of at least 150 ° C at atmospheric pressure. |