http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20160074409-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02422 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68721 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-324 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L51-0097 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-687 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-324 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate | 2015-12-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cdf31b5c77a52e2f6e6c20881a955c77 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e5d739bf1e125ee4b35ca101848231f6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b1cfcf73e3c37f12189cb8ff85ce6ea1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7ae809e537af93cf33057c7211d7f7e1 |
| publicationDate | 2016-06-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20160074409-A |
| titleOfInvention | Heat transfer sheet and substrate processing apparatus |
| abstract | Thereby providing a heat-transfer sheet having high tensile properties having predetermined tensile properties. After pressing the heat-transfer sheet between a member including silicon and a member including aluminum for a predetermined time, one end of the two members sandwiching the heat-transfer sheet is held by the first clamp, One end of the other member is held by a second clamp, one of the clamps of the first and second clamps is fixed, and the other clamp is mounted on the opposite side at a speed of 0.1 mm / min to 0.5 mm / min (Y) of the tensile force when the displacement X of the heat-transfer sheet is in the range of 0.2 mm? X? 0.4 mm when the tensile test is performed N times (2? N? 10) is 0.1 N / And the nonuniformity of the tensile force is in the range of 0.2 mm < = X < = 0.4 mm in the displacement amount X of the heat transfer sheet is within the range of +/- 25% of the median value of the tensile force . |
| priorityDate | 2014-12-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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