| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_65e6cc42bb2719da1d60772d005416f5 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1436
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1454
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1409 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-12 |
| filingDate |
2014-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_885dd427e274e20678019dbee02aa648
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_73f5bce376945b04204c044560b64f57
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_82a385847712c601d2a5fbd3d1e552a8 |
| publicationDate |
2016-06-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20160073036-A |
| titleOfInvention |
Surface-modified abrasive and polishing slurry composition comprising the same |
| abstract |
The present invention relates to a surface-modified abrasive particle, and a polishing slurry composition containing the same, wherein the surface-modified abrasive particle according to the first aspect of the present invention comprises abrasive particles; And a compound which is formed on the surface of the abrasive grains and has a positive electric charge in the range of pH 2 to 5. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10556321-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020521843-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11731244-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018236967-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3642294-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200012023-A |
| priorityDate |
2014-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |