| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6f932d94618d9b875e401457b33e9761 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-5004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-50 |
| filingDate |
2014-12-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_38da1c79bc9db2a64ed767106fc386de
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_667a659bfc93a89f972f1e1ea5bb5aac
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_56d3f41d795c57d1061a4bb1c3c563f5 |
| publicationDate |
2016-06-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20160070385-A |
| titleOfInvention |
Composition for removing silicone polymer |
| abstract |
The present invention relates to a composition for removing a silicone resin, and more particularly to a composition for removing a silicone resin containing a ketone solvent and a quaternary ammonium fluoride compound. Based resin is excellent in the decomposition speed of the resin and suppresses the decomposition rate of the silicone resin from deteriorating with the passage of time. Therefore, in the manufacturing process of electronic parts and the like, for example, And the silicon-based resin remaining on the wafer circuit surface can be effectively removed. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-115074189-A |
| priorityDate |
2014-12-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |