| abstract |
The present invention relates to an optically transparent electrically insulating substrate, a touch sensor device having at least one optically transparent electrically conductive sensor member disposed on the substrate and at least one contact structure for electrically contacting the optically transparent sensor member . Wherein the contact structure has a composition represented by a composition formula Mo a X b O c N d wherein b is 0 wherein X represents an element selected from the group consisting of niobium, tantalum, vanadium, tungsten, chromium, rhenium, hafnium, titanium and zirconium, Combination) And at least one layer made of a metal oxynitride. |