http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20160064923-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0274 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0332 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-033 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2015-01-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f2bf3be70c366978eb28c443608c0838 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_431e2e872ec5028049514dc533e931a0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_03f3453937c10812777d8d09d03092a4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_44a51c6696866cb9ec86ff32821f2d82 |
| publicationDate | 2016-06-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20160064923-A |
| titleOfInvention | Pellicle and exposure mask comprising the same |
| abstract | The present invention relates to a pellicle and an exposure mask including the pellicle, and more particularly, to a pellicle frame capable of surrounding a predetermined region of a photomask substrate. An attaching element formed on one surface of the pellicle frame facing the photomask substrate; And a pellicle membrane formed on the other surface of the pellicle frame, wherein the attachment member has a primary structure capable of generating negative pressure on a surface thereof facing the photomask substrate. The use of the pellicle according to the technical idea of the present invention makes it unnecessary to use chemicals that can damage the mask pattern due to no residue left after the mask is removed from the exposure mask and the pellicle can be recycled, There is an effect. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112631066-A |
| priorityDate | 2014-11-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 327.