| abstract |
[Solution] An onium salt compound represented by the general formula (1). (Wherein R 11 , R 22 , R 33 , R 44 , R 55 and R 01 each represent a hydrogen atom or a monovalent hydrocarbon group, and j is 0 or 1. Z + represents a sulfonium cation represented by the general formula (a) Represents an iodonium cation represented by the general formula (b).) (R 100 , R 200 and R 300 each represent a monovalent hydrocarbon group, and R 400 and R 500 represent a monovalent hydrocarbon group.) [Effect] The onium salt compound contained in the resist composition of the present invention can function as an acid diffusion control agent, resulting in a small MEF and LWR, excellent depth of focus, and high resolution pattern profile. |