| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24355
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24612
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0201 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6838
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67092 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 |
| filingDate |
2009-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6f2c404dd61513316724cd9c5e1c6c89
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4c9ba164ee7579081f120a7305d26342
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_52ef2fd9c6d895dbaeded986e0a4f950
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_25139dc17c5cb13ba2e68c2e7e3cfc63
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a0fe4ac2abb24c46006407a8cf4eb4d0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5fad43b42f4ea235b58d834e7a1b143a |
| publicationDate |
2016-05-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20160054630-A |
| titleOfInvention |
Improved carrier head membrane |
| abstract |
A method and apparatus for planarizing a substrate are provided. There is provided a substrate carrier head having an improved cover for firmly supporting the substrate. This cover may have a bead that is larger than the recesses that are fitted into it, so that compression creates a conformal seal within the recess. In addition, the head may be left uncoated to improve adhesion of the beads to the surface of the groove. The surface of the cover may be roughened to reduce adhesion of the substrate to the cover without using a non-stick coating. |
| priorityDate |
2008-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |