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publicationDate 2016-05-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20160049389-A
titleOfInvention Method of manufacturing integrated circuit device using photomask cleaning composition
abstract In the method for manufacturing an integrated circuit device, a photomask is wet-treated using a cleaning composition containing an organic acid, an oxidizing agent, and DIW (deionized water).
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