| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_65e6cc42bb2719da1d60772d005416f5 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2225-06541 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1409
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1472 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 |
| filingDate |
2014-10-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_885dd427e274e20678019dbee02aa648
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e8719291f60f6ecdce6586234573b99d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_150670b0e8ca5a9070bc340291db95ae
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_60331e3f739a82dba43dea88a0b8f26f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c4ba36f745b4f14ec1982e30bf12b2f2 |
| publicationDate |
2016-04-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20160043676-A |
| titleOfInvention |
Slurry composition |
| abstract |
The present invention relates to abrasive particles; And a nitride film polishing inhibitor. The slurry composition of the present invention can effectively inhibit the polishing of the nitride film without affecting the oxide film and metal film polishing rate by including the nitride film polishing inhibitor, This enables a high oxide / nitride selective etch for polishing through silicon via (TSV) wafers. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112574675-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101874999-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101874996-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112574675-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102410845-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11643573-B2 |
| priorityDate |
2014-10-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |