http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20160042676-A

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filingDate 2014-10-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_479e166323202c71e9460381767b0f7e
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publicationDate 2016-04-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20160042676-A
titleOfInvention Carbon nanofibers with sharp tip structure and carbon nanofibers growth method using of palladium catalyst
abstract (S1) depositing an alumina layer on a silicon substrate; (S2) depositing palladium on the alumina layer to form a palladium catalyst layer; And (S3) growing carbon nanofibers on the palladium catalyst layer by chemical vapor deposition (CVD), and growing the carbon nanofibers on the silicon substrate on which the alumina layer is deposited, The carbon nanofiber is characterized in that the radius of curvature at the tip is 5 nm or less, the diameter is 50 nm or less, the growth length is 1 mm or more, and the aspect ratio of growth length and diameter is 50,000 or more.
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