abstract |
Provided is a non-ionic photoacid generator having a high optical sensitivity to i-line, excellent heat stability, and excellent solubility in a hydrophobic material. The present invention is a nonionic system photoacid generator (A) characterized by being represented by the following general formula (1). Wherein R1 and R2 each independently represent an alkyl group having 1 to 18 carbon atoms or a fluoroalkyl group having 1 to 18 carbon atoms, an alkenyl group having 2 to 18 carbon atoms, an alkynyl group having 2 to 18 carbon atoms, M and n represent the numbers of R1 and R2, respectively, the number of which is an integer of 0 to 3, and the total number (m + n) of R1 and R2 is 1 to 6 It is an integer. m R1 and n R2 may be the same or different. R3 represents a hydrocarbon group having 1 to 18 carbon atoms (some or all of hydrogen may be substituted with fluorine). |