| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_335a2020aa14e010b96c9c0b180b40f2 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2218-112
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2217-253 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-45
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-288
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B29-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B19-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C17-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L51-0008
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L51-0021
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L51-0059
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4486
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L51-0026
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L51-0007 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-00 |
| filingDate |
2015-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ce29f4797f277ab47b9bca7d9f76bd96
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d4ed7cb223c5dcc6cf25c59a9b1f75a7 |
| publicationDate |
2016-03-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20160026761-A |
| titleOfInvention |
Method of forming metal film |
| abstract |
[PROBLEMS] To provide a metal film forming method capable of industrially advantageously forming a metal film having excellent adhesion and a metal film formed by the method. Means for Solving the Problems: A metal film forming method for forming a metal film on a substrate, comprising the steps of: fogging a mist of a raw material solution formed by dissolving or dispersing in an organic solvent solvent of an oxidizing agent, a chelating agent or an organic solvent containing a proton acid; A carrier gas supplying step of supplying a carrier gas to the mist; a mist supplying step of supplying the mist to the gas by the carrier gas; and a step of thermally reacting the mist to cause a part or all of the surface of the substrate, And a metal film forming step of laminating the film. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190023053-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11107926-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11424320-B2 |
| priorityDate |
2014-08-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |