| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf8d77ac0eff1767b22d2fb9445b64d |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76825 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-401
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02109
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76877
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5329
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-53238
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76814
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76843
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76835
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76826
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76831
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76876
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-762 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-762
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-56 |
| filingDate |
2015-08-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6e7b1d668e9e2d9cd9a18b410c8527fd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c19a90fda2adffcd0953583ab07b4961
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e281f9a4fd35335b1c77e5f0e8bfb07a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1b212158b82dee7817ba822f95c0d06f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_294c8b2f3e5907e921015fd4ee943881
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_90eef05b8dcef869220ec514c69d10cd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_df4f82a51d4fe846225e74cf8dbfdb18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dc0011a990761491c8990fc5af46e90b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4fe2ed0e1fac2c54870d97f18a272eef |
| publicationDate |
2016-03-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20160022788-A |
| titleOfInvention |
Flowable dielectric for selective ultra low-k pore sealing |
| abstract |
Embodiments of the methods and apparatus disclosed herein relate to pore sealing of porous dielectric films using a flowable dielectric material. The methods involve exposing a substrate having a porous dielectric film exposed on the substrate to a vapor phase dielectric precursor under conditions such that a flowable dielectric material is selectively deposited in the pores of the porous dielectric material. The pores may be filled with a deposited flowable dielectric material without depositing a continuous film on any exposed metal surface. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200007873-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180099504-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11066747-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200108512-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109417042-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109417042-A |
| priorityDate |
2014-08-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |