| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ca153439fc463ec4aae6f708caa92bb3 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L2201-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0048
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0035
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0048
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F226-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D139-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F8-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-405
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D133-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0273 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D133-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F8-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F226-10 |
| filingDate |
2014-05-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d2e62e146c1baa77b51ce6af329e669a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bfe71d184cfa1eef803007f0a5e32771
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3c0fab30bdd4f7d0fb961eaca0483a56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bfcfb9711d74d28caab001a7e8333dc8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_95865ac749fb28b9ebb97c9c6458cd1f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5b498324260a9e9b0b3afa52d2579ffb |
| publicationDate |
2016-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20160011183-A |
| titleOfInvention |
A composition comprising a polymeric thermal acid generator and processes thereof |
| abstract |
The present invention relates to a novel aqueous composition comprising a polymeric acid generator and a method of forming a polymeric acid generator layer on a photoresist pattern by coating the new composition onto a photoresist pattern. Polymeric thermal acid generators include polymers having one or more repeating units of the following structural formula: Wherein R 1 to R 5 are independently selected from the group consisting of H and C 1 -C 6 alkyl; R 6 is selected from the group consisting of unsubstituted aryl, substituted aryl, alkyl (C 1 -C 8 ) and fluoroalkyl (C 1 -C 8 ) and W is a C 2 -C 6 alkylene spacer. |
| priorityDate |
2013-05-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |